Solutions for Wafer Handling

Solutions for handling wafer is suitable for the semiconductor manufacturing industry, with high requirements for stability and accuracy.

EFEM Wafer Handling System

The EFEM Wafer Handling System is particularly developed for wafer handling purpose in the semiconductor industry, which can be applied to the loading/unloading operations between numerous semiconductor processes:
1. With high dust-free level, high stability and high precision...etc.
2. Compatible with the handling process of various AOI wafer inspection equipment.
3. Can be customized by OEM/ODM and designed according to actual workflow.

4 Prot EFEM Wafer Handling Module (Front)
4 Port EFEM Wafer Handling Module (Front)
4 Prot EFEM Wafer Handling Module (Back)
4 Port EFEM Wafer Handling Module (Back)
4 Prot EFEM Wafer Handling Module (Inside)
4 Port EFEM Wafer Handling Module (Inside)

  • 2 Port EFEM Wafer Handling Module
    2 Port EFEM Wafer Handling Module
  • 17 Port EFEM Wafer Handling Module
    17 Port EFEM Wafer Handling Module
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